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AssigneeCanon Kabushiki Kaisha
InventorTakeshi Yamamoto
Estimating the term…
A conveyance system comprising a movable element including a first coil group and a second coil group, and a stator including a plurality of magnetic bodies disposed along the first direction so that the plurality of magnetic bodies are capable of facing the first coil group and the second coil group. The first coil group includes a plurality of first coils disposed along a first direction, and the second coil group includes a plurality of second coils disposed along a second direction intersecting with the first direction. In a case where electric current is applied to the first coil group or the second coil group, a force is generated between the movable element and the plurality of magnetic bodies. The movable element is capable of moving in the first direction along the plurality of magnetic bodies while an orientation of the movable element is controlled by the generated force.
A conveyance system comprising:
A movable element comprising:
A control apparatus to move a movable element, wherein the moveable element includes a first coil group disposed along a first direction and a second coil group disposed along a direction intersecting with the first direction along a magnetic body that is disposed along the first direction to face the first coil group and the second coil group, the control apparatus comprising:
A control method to move a movable element, wherein the moveable element includes a first coil group disposed along a first direction and a second coil group disposed along a direction intersecting with the first direction along a magnetic body that is disposed along the first direction to face the first coil group and the second coil group, the control method comprising:
Dependencies are inferred from the claim text.