Semiconductor device with u-shaped channel and electronic apparatus including the same

Abstract

A semiconductor device with U-shaped channel and electronic apparatus including the same are disclosed. the semiconductor device includes a first device and a second device opposite to each other on a substrate. The two devices each include: a channel portion vertically extending on the substrate and having a U-shape in a plan view; source/drain portions respectively located at upper and lower ends of the channel portion and along the U-shaped channel portion; and a gate stack overlapping the channel portion on an inner side of the U-shape. An opening of the U-shape of the first device and an opening of the U-shape of the second device are opposite to each other. At least a portion of the gate stack of the first device close to the channel portion and at least a portion of the gate stack of the second device close to the channel portion are substantially coplanar.

Dependencies are inferred from the claim text.