Ferroelectric memories
AssigneeIndustrial Technology Research Institute
InventorsYu-De LIN, Heng-Yuan LEE, Po-Chun YEH, Hsin-Yun YANG
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Abstract
A ferroelectric memory is provided. The ferroelectric memory includes a first electrode layer having a dominant crystallographic orientation of (110) or (220), a second electrode layer opposite the first electrode layer, wherein the second electrode layer has a dominant crystallographic orientation of (110) or (220), and a ferroelectric layer disposed between the first electrode layer and the second electrode layer, wherein the ferroelectric layer has a dominant crystallographic orientation of (111).
Claims23
A ferroelectric memory, comprising:
- a first electrode layer having a dominant crystallographic orientation of (110) or (220);
- a second electrode layer opposite the first electrode layer, wherein the second electrode layer has a dominant crystallographic orientation of (110) or (220);
- and
- a ferroelectric layer disposed between the first electrode layer and the second electrode layer, wherein the ferroelectric layer has a dominant crystallographic orientation of (111).
A ferroelectric memory, comprising:
- a substrate;
- a first conductive layer disposed on the substrate;
- a patterned oxide layer disposed on the first conductive layer and the substrate, exposing a part of the first conductive layer;
- a second conductive layer disposed on the exposed first conductive layer and the patterned oxide layer;
- a first electrode layer disposed on the exposed first conductive layer and the second conductive layer, wherein the first electrode layer has a dominant crystallographic orientation of (110) or (220);
- a ferroelectric layer disposed on the first electrode layer, wherein the ferroelectric layer has a dominant crystallographic orientation of (111);
- a second electrode layer disposed on the ferroelectric layer, wherein the second electrode layer has a dominant crystallographic orientation of (110) or (220);
- a stress layer disposed between the second electrode layer;
- and
- a third conductive layer disposed on the stress layer and the second electrode layer.
Dependencies are inferred from the claim text.