Simulation method, simulation apparatus, and storage medium
AssigneeCanon Kabushiki Kaisha
InventorsShintaro Narioka, Yuichiro Oguchi
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AssigneeCanon Kabushiki Kaisha
InventorsShintaro Narioka, Yuichiro Oguchi
Estimating the term…
A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical property value of a gas between the first and second members, inputting a movement profile of the second member with respect to the first member when bringing the droplets of the curable composition on the first and second members into contact with each other, obtaining a pressure of the gas between the first and second members based on the physical property value and the input movement profile, and predicting, based on the pressure, an amount of a residual gas confined among the droplets by the contact between the droplets and the second member.
A simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member and a second member into contact with each other, and forming a film of the curable composition on the first member, comprising:
A simulation apparatus for predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member and a second member into contact with each other, and forming a film of the curable composition on the first member,
Dependencies are inferred from the claim text.