Intelligent condition monitoring and fault diagnostic system for preventative maintenance
AssigneeBrooks Automation, Inc.
InventorsMartin HOSEK, Jay KRISHNASAMY, Jan PROCHAZKA
Life of this patent
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Abstract
A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
Claims32
A continuous health monitoring system comprising:
- a non-transitory data collection function that acquires time histories of one or more variables of a vacuum component related to operation of a vacuum device during component operations;
- a non-transitory pre-processing function that calculates specific characteristics of the time histories;
- a non-transitory analysis for evaluating the characteristics to produce one or more hypotheses about a condition of the vacuum component;
- and
- a non-transitory reasoning function for determining the condition of the vacuum component from the one or more hypotheses,
- wherein the data collection, pre-processing, and analysis functions operate in parallel with the component operations.
A method of continuously monitoring system health comprising:
- acquiring time histories of one or more variables of a vacuum component related to operation of a vacuum device during component operations;
- calculating specific characteristics of the time histories during the component operations;
- in parallel with the component operations, evaluating the characteristics to produce one or more hypotheses about a condition of the vacuum component;
- and
- determining the condition of the vacuum component from the one or more hypotheses.
Dependencies are inferred from the claim text.