Device and method for processing a microstructured component
AssigneeCarl Zeiss SMT GmbH
InventorsNicole Auth, Timo Luchs, Joachim Welte
Life of this patent
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Abstract
The invention relates to a device and a method for processing a microstructured component, in particular for microlithography. A device for processing a microstructured component comprises an ion beam source for applying an ion beam to at least regions of the component, wherein an ion energy of this ion beam is no more than 5 keV, and a detector for detecting particles backscattered at the component.
Claims23
A device for processing a microstructured component, comprising:
- an ion beam source configured to apply an ion beam to at least regions of the component, wherein an ion energy of the ion beam is no more than 5 keV;
- and
- a detector for detecting particles backscattered at the component;
- wherein the detector is designed to detect ions backscattered at the component.
A method for processing a microstructured component, wherein the method includes the following steps:
- applying an ion beam to the component, wherein an ion energy of the ion beam is no more than 5 keV;
- and
- using a detector to detect particles backscattered at the component;
- wherein the particles comprise ions.
A device for processing a microstructured component, the device comprising:
- an ion beam source for applying an ion beam to at least regions of the component, wherein an ion energy of this ion beam is no more than 5 keV;
- and
- a detector for detecting particles backscattered at the component;
- wherein the device is configured to define an end of the processing on the basis of a detector signal supplied by the detector.
A method for processing a microstructured component, the method comprising:
- applying an ion beam to the component, wherein an ion energy of this ion beam is no more than 5 keV;
- using a detector to detect particles backscattered at the component;
- and
- defining an end of the processing on the basis of a detector signal supplied by the detector.
Dependencies are inferred from the claim text.