Inspection system of semiconductor device and related inspection method
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsGuangdian Chen, JIN XING CHEN
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Abstract
An inspection system of semiconductor device includes a light source for producing a light beam, a lens module including at least one metalens, a receiver, and a processor. During an inspection process, the light beam emitted from the light source is focused on a target object by the metalens of the lens module and is reflected to form a reflected light by the target object. The receiver is used for receiving the reflected light. The processor is used for receiving an electric signal corresponding to the reflected light and generating an inspection result.
Claims18
An inspection system of semiconductor device, comprising:
- a light source for producing a light beam;
- a lens module comprising at least one metalens, wherein during an inspection process, the light beam emitted from the light source is focused on a target object by the metalens of the lens module and is reflected to form a reflected light by the target object;
- a receiver for receiving the reflected light;
- and
- a processor for receiving an electric signal corresponding to the reflected light and generating an inspection result.
An inspection method of semiconductor device, comprising following steps:
- (a) providing an inspection system of semiconductor device, the inspection system comprising:
- a light source for producing a light beam;
- a lens module for receiving the light beam, wherein the lens module comprises at least one metalens;
- a receiver for receiving a reflected light of the light beam;
- and
- a processor for receiving an electrical signal corresponding to the reflected light and generating an inspection result;
- (b) providing a target object facing the lens module, wherein the target object comprises at least one semiconductor device;
- (c) emitting the light beam by the light source such that the light beam passing through the metalens is focused on the semiconductor device and forms a reflected light by the semiconductor device;
- (d) sending the electric signal corresponding to the reflected light to the processor after the receiver receives the reflected light;
- and
- (e) producing an inspection image by the processor according to the electric signal to obtain an inspection result.
Dependencies are inferred from the claim text.