Liquid source vaporization apparatus

Abstract

The liquid source vaporization apparatus comprises a tank inside of which a liquid source is stored, a heater that applies heat to the liquid source in the tank, a plurality of liquid surface detecting bodies wherein each of liquid surface detecting points is arranged in a predetermined height range in the tank with a set height regarded as the reference, a reference detecting body arranged above the predetermined height range in the tank, and a liquid surface discriminator that discriminates whether or not there is the liquid source at the set height on a basis of a threshold value set based on a change in electrical resistance of the reference detecting body and a change in electrical resistance of a plurality of the liquid surface detecting bodies.

Dependencies are inferred from the claim text.