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US 2021/0131440 A1Published application
Gas recirculation device and system having such a device
AssigneePfeiffer Vacuum GmbH
InventorsSebastian OBERBECK, Jonas BECKER
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Abstract
The invention relates to a recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump, wherein the recirculation pump is a side channel pump.
Claims16
A recirculation device for a gas of a process device, said recirculation device comprising a recirculation pump,
- wherein the recirculation pump is a side channel pump.
A system comprising
- a process device having a space and/or a line for receiving a gas;
- and
- a recirculation device by which the gas can be removed from the process device and can be returned into the process device, said recirculation device comprising a recirculation pump,
- wherein the recirculation pump is a side channel pump.
1 more element
Dependencies are inferred from the claim text.