US 2021/0123796 A1 · SENSOR AND INSPECTION DEVICE

Abstract

According to an embodiment of the invention, a sensor includes a first element part. The first element part includes a first member and a first element. The first member is tubular and extends along a first direction. The first member includes a first opening and a second opening. A direction from the second opening toward the first opening is along the first direction. The first element includes a vibratile first membrane, and a first supporter supporting the first membrane. The second opening is between the first opening and the first membrane in the first direction.

Claims11

Dependent claims

A sensor, comprising:

a first element part including
a first member extending along a first direction, the first member being tubular and including a first opening and a second opening, a direction from the second opening toward the first opening being along the first direction, and
a first element,
the first element including
a first membrane, the first membrane being vibratile, and
a first supporter supporting the first membrane,
the second opening being between the first opening and the first membrane in the first direction.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/012,338Filed 4 Sep 2020

Priority

JP 2019-19265823 Oct 2019

Published

29 Apr 2021

Term ends

Not estimatedThe source records don’t support an estimate.

Classification27 codes

G01B 17/02
Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations: for measuring thickness
G10K 9/22
Details, e.g. bulbs, pumps, pistons, switches or casings: mountings; Casings
G01H 9/00
Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive
G01N 29/11
Analysing solids: by measuring attenuation of acoustic waves

Sensor and inspection device

Life of this patent

Sensor and inspection device

Life of this patent

Abstract

Claims11