Edge exclusion apparatus and methods of using the same
AssigneeCanon Kabushiki Kaisha
InventorByung-Jin CHOI
Life of this patent
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Abstract
A method of deposition is disclosed. The method can include dispensing a formable material over a substrate, where the substrate includes a non-uniform surface topography, and where the substrate includes an active zone and an exclusion zone. The method can also include curing the formable material in the exclusion zone to form a circular edge between the exclusion zone and the active zone, contacting the formable material with a superstrate, and curing the formable material in the active zone to form a layer over the substrate, wherein curing is performed while the superstrate is contacting the formable material.
Claims20
A method of deposition, comprising:
- dispensing a formable material over a substrate, wherein the surface area of the substrate is divided into an active zone and an exclusion zone;
- contacting the formable material over the substrate with a superstrate;
- curing the formable material to form a circular boundary area of the exclusion zone, wherein the circular boundary area of the exclusion zone faces the active zone;
- and
- curing the formable material in the active zone to form a layer over the substrate, wherein curing is performed while the superstrate is contacting the formable material.
An apparatus, comprising:
- a stage configured to hold a substrate, wherein the substrate comprises an exclusion zone and an active zone;
- a superstrate holder configured to hold a superstrate;
- a fluid dispenser configured to dispense a curable material on the substrate;
- and
- one or more light sources configured to rotate around the substrate to direct light at the exclusion zone to form a circular boundary between the exclusion zone and the active zone.
A method of manufacturing an article, comprising:
- dispensing a formable material over a substrate, wherein the surface area of the substrate is divided into an active zone and an exclusion zone;
- contacting the formable material over the substrate with a superstrate;
- curing the formable material to form a circular boundary area of the exclusion zone, wherein the circular boundary area of the exclusion zone faces the active zone;
- curing the formable material in the active zone to form a layer over the substrate, wherein curing is performed while the superstrate is contacting the formable material;
- separating the superstrate and the planar layer on the substrate;
- processing the substrate on which the planar layer has been formed;
- and
- manufacturing the article from the processed substrate.
Dependencies are inferred from the claim text.