US 2021/0082969 A1 · ARRAY SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

Abstract

An array substrate and manufacturing method thereof are provided. The method includes: forming a gate metal layer on a substrate, and forming a gate insulating layer on the gate metal layer; forming amorphous silicon layer, N-type amorphous silicon layer, source and drain metals on the gate insulating layer corresponding to the gate metal layer, the source and drain metals being on same layer; forming a metal layer to be a lower metal layer of photosensor on an extension of the gate insulating layer; forming light sensing layer, passivation layer and photoresist layer on source metal, drain metal and metal layer; and forming the first light sensing layer and first passivation layer on the source and drain metals to form switch element; and forming the second light sensing layer and second passivation layer on the metal layer to form the photosensor by etching with same halftone mask.

Claims20

Dependent claims

A method of manufacturing an array substrate, comprising:

forming a gate metal layer on a substrate, and forming a gate insulating layer on the gate metal layer;
forming an amorphous silicon layer, an N-type amorphous silicon layer and a source metal and a drain metal on the gate insulating layer and in correspondence with the gate metal layer, wherein the source metal and the drain metal are on a same layer;
forming a metal layer to be a lower metal layer of a photosensor on an extension of the gate insulating layer;
forming a light sensing layer, a passivation layer and a photoresist layer on the source metal, the drain metal and the metal layer;
and
forming a first light sensing layer and a first passivation layer on the source metal and the drain metal to form a switch element, and forming a second light sensing layer and a second passivation layer on the metal layer to form the photosensor by way of etching through a same halftone mask.

3 more elements

Dependencies are inferred from the claim text.

Array substrate and method of manufacturing the same

Life of this patent

Array substrate and method of manufacturing the same

Life of this patent

Abstract

Claims20