Semiconductor memory device
AssigneeKioxia Corporation
InventorsKunifumi SUZUKI, Masumi SAITOH
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AssigneeKioxia Corporation
InventorsKunifumi SUZUKI, Masumi SAITOH
Estimating the term…
Provided is a semiconductor memory device according to an embodiment including: a stacked body including gate electrode layers stacked in a first direction; a semiconductor layer provided in the stacked body and extending in the first direction; and a gate insulating layer provided between the semiconductor layer and at least one of the gate electrode layers, and the gate insulating layer including a first region containing a first oxide including at least one of a hafnium oxide and a zirconium oxide, in which a first length of the at least one of the gate electrode layers in the first direction is larger than a second length of the first region in the first direction.
A semiconductor memory device comprising:
A semiconductor memory device comprising:
A semiconductor memory device comprising:
Dependencies are inferred from the claim text.