Three-dimensional memory devices having through stair contacts and methods for forming the same
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsQinxiang Wei, Jianhua Sun, Ji Xia
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsQinxiang Wei, Jianhua Sun, Ji Xia
Estimating the term…
Embodiments of three-dimensional (3D) memory devices having through stair contacts (TSCs) and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack and a TSC. The memory stack includes a plurality of interleaved conductive layers and dielectric layers. Edges of the interleaved conductive layers and dielectric layers define a staircase structure on a side of the memory stack. The TSC extends vertically through the staircase structure of the memory stack. The TSC includes a conductor layer and a spacer circumscribing the conductor layer.
A three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.