Semiconductor memory device and method of manufacturing the same

A semiconductor memory device, comprising:

• a substrate which includes a first region and a second region, the first region including a memory cell transistor, the second region being adjacent to the first region in a first direction and including first to third subregions aligned in a second direction intersecting the first direction;
• a first insulating member and a second insulating member each being provided across the first region and the second region along the first direction, and including a portion that interposes the first to third subregions in the second direction;
• a first conductive layer provided in a first layer above the substrate so as to extend along the first direction across the first region and the second region between the first insulating member and the second insulating member;
• a plurality of first pillars provided in the first region so as to penetrate the first conductive layer;
• a first insulating layer provided in the first layer in the second subregion, and surrounded by a portion of the first conductive layer that extends in the first layer across the second region;
• a first contact provided so as to penetrate the first insulating layer;
• a plurality of first members each including a portion extending along the first direction, and provided so as to penetrate the first conductive layer in the first subregion;
• and
• a plurality of second members each including a portion extending along the first direction, and provided so as to penetrate the first conductive layer in the third subregion, wherein
• both the first members and the second members are arranged in such a manner that the first members and the second members aligned in the second direction in an n-th row and an (n+1)-th row, counted from a side of the second subregion, are shifted in the first direction, where n is an integer not less than one, and
• both the first members adjacent to each other in the second direction and the second members adjacent to each other in the second direction are arranged in such a manner that portions extending in the first direction face each other.