Semiconductor device including source/drain contact having height below gate stack
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCharles Chew-Yuen YOUNG, Chih-Liang CHEN, Chih-Ming LAI, Jiann-Tyng TZENG, Shun-Li CHEN, Kam-Tou SIO, Shih-Wei PENG, Chun-Kuang CHEN, Ru-Gun LIU
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