US 2021/0082500 A1 · SEMICONDUCTOR MEMORY DEVICE

a plurality of first wirings disposed at a first level and extending in a first direction;

a second wiring and a third wiring disposed at a second level, a position of which in a second direction intersecting with the first direction is different from that of the first level, the second wiring and the third wiring extending in a third direction that intersects with the first direction and the second direction, and being separated from each other;

a plurality of first resistive change elements each including a first terminal and a second terminal and disposed between one of the first wirings and one of the second wiring and the third wiring, the first terminal being electrically connected to the one of the first wirings, and the second terminal being electrically connected to the one of the second wiring and the third wiring;

a fourth wiring disposed to be in contact with a face of the second wiring opposite to the first wirings and extending in the third direction;

a fifth wiring disposed to be in contact with a face of the third wiring opposite to the first wirings, extending in the third direction, and separated from the fourth wiring;

a plurality of sixth wirings disposed at a third level and extending in the first direction, the second level being between the first level and the third level;

a plurality of second resistive change elements each including a third terminal and a fourth terminal and disposed between one of the fourth wiring and the fifth wiring and one of the sixth wirings, the third terminal being electrically connected to the one of the fourth wiring and the fifth wiring, and the fourth terminal being electrically connected to the one of the sixth wirings;

a plurality of seventh wirings disposed to correspond to the sixth wirings and extending in the first direction, each of the seventh wirings being disposed to be in contact with a face of corresponding one of the sixth wirings opposite to the second resistive change elements;

an eighth wiring and a ninth wiring disposed at a fourth level, extending in the third direction, and separated from each other, the third level being between the fourth level and the second level;

a plurality of third resistive change elements each including a fifth terminal and a six terminal and disposed between one of the seventh wirings and one of the eighth wiring and the ninth wiring, the fifth terminal being electrically connected to the one of the seventh wirings, and the six terminal being electrically connected to the one of the eighth wiring and the ninth wiring;

a tenth wiring disposed to be in contact with a face of the eighth wiring opposite to the seventh wirings and extending in the third direction;

an eleventh wiring disposed to be in contact with a face of the ninth wiring opposite to the seventh wirings and extending in the third direction, and separated from the tenth wiring;

a plurality of twelfth wirings disposed at a fifth level and extending in the first direction, the fourth level being between the fifth level and the third level;

a plurality of fourth resistive change elements each including a seventh terminal and an eighth terminal and disposed between one of the tenth wiring and the eleventh wiring and one of the twelfth wirings, the seventh terminal being electrically connected to the one of the tenth wiring and the eleventh wiring, and the eighth terminal being electrically connected to the one of the twelfth wirings;

a plurality of thirteenth wirings disposed to correspond to the twelfth wirings and extending in the first direction, each of the thirteenth wirings disposed to be in contact with a face of corresponding one of the twelfth wirings opposite to the fourth resistive change elements;

a fourteenth wiring and a fifteenth wiring disposed at a sixth level, extending in the third direction, and separated from each other, the fifth level being between the sixth level and the fourth level, a region between the tenth wiring and the eleventh wiring, a region between the eighth wiring and the ninth wiring, a region between the fourth wiring and the fifth wiring, and a region between the second wiring and the third wiring being located at positions in the second direction from a portion of the fourteenth wiring;

a plurality of fifth resistive change elements each including a ninth terminal and a tenth terminal and disposed between one of the thirteenth wirings and one of the fourteenth wiring and the fifteenth wiring, the ninth terminal being electrically connected to the one of the thirteenth wirings, and the tenth terminal being electrically connected to the one of the fourteenth wiring and the fifteenth wiring;

a sixteenth wiring disposed to be in contact with a face of the fourteenth wiring opposite to the thirteenth wirings and extending in the third direction;

a seventeenth wiring disposed to be in contact with a face of the fifteenth wiring opposite to the thirteenth wirings and extending in the third direction, and separated from the sixteenth wiring;

a plurality of eighteenth wirings disposed at a seventh level and extending in the first direction, the sixth level being between the seventh level and the fifth level;

a plurality of sixth resistive change elements each including an eleventh terminal and a twelfth terminal and disposed between one of the sixteenth wiring and the seventeenth wiring and one of the eighteenth wirings, the eleventh terminal being electrically connected to the one of the sixteenth wiring and the seventeenth wiring, and the twelfth terminal being electrically connected to the one of the eighteenth wirings;

a plurality of nineteenth wirings disposed to correspond to the eighteenth wirings and extending in the first direction, each of the nineteenth wirings disposed to be in contact with a face of corresponding one of the eighteenth wirings opposite to the sixth resistive change elements;

a twentieth wiring and a twenty-first wiring disposed at an eighth level, extending in the third direction, and separated from each other, the seventh level being between the eighth level and the sixth level, a region between the sixteenth wiring and the seventeenth wiring, a region between the fourteenth wiring and the fifteenth wiring, a region between the tenth wiring and the eleventh wiring, a region between the eighth wiring and the ninth wiring, a region between the fourth wiring and the fifth wiring, and a region between the second wiring and the third wiring being located at positions in the second direction from a portion of the twentieth wiring;

a plurality of seventh resistive change elements each including a thirteenth terminal and a fourteenth terminal and disposed between one of the nineteenth wirings and one of the twentieth wiring and the twenty-first wiring, the thirteenth terminal being electrically connected to the one of the nineteenth wirings, and the fourteenth terminal being electrically connected to the one of the twentieth wiring and the twenty-first wiring;

a twenty-second wiring disposed to be in contact with a face of the twentieth wiring opposite to the nineteenth wirings and extending in the third direction;

a twenty-third wiring disposed to be in contact with a face of the twenty-first wiring opposite to the nineteenth wirings and extending in the third direction, and separated from the twenty-second wiring;

a plurality of twenty-fourth wirings disposed at a ninth level and extending in the first direction, the eighth level being between the ninth level and the seventh level;

a plurality of eighth resistive change elements each including a fifteenth terminal and a sixteenth terminal and disposed between one of the twenty-second wiring and the twenty-third wiring and one of the twenty-fourth wirings, the fifteenth terminal being electrically connected to the one of the twenty-second wiring and the twenty-third wiring, and the sixteenth terminal being electrically connected to the one of the twenty-fourth wirings;

a first contact electrically connected to a portion of the third wiring;

a second contact electrically connected to an end of the ninth wiring on a side of the eighth wiring, and passing through the region between the fourth wiring and the fifth wiring and the region between the second wiring and the third wiring;

a third contact electrically connected to an end of the fourteenth wiring on a side of the fifteenth wiring, and passing through the region between the tenth wiring and the eleventh wiring, the region between the eighth wiring and the ninth wiring, the region between the fourth wiring and the fifth wiring, and the region between the second wiring and the third wiring;

and

a fourth contact electrically connected to the portion of the twentieth wiring, and passing through the region between the sixteenth wiring and the seventeenth wiring, the region between the fourteenth wiring and the fifteenth wiring, the region between the tenth wiring and the eleventh wiring, the region between the eighth wiring and the ninth wiring, the region between the fourth wiring and the fifth wiring, and the region between the second wiring and the third wiring.

Semiconductor memory device

Life of this patent

Semiconductor memory device

Life of this patent

Abstract

Claims14