Dual-mode autonomous guided vehicle
AssigneeLam Research Corporation
InventorsChristopher W. Burkhart, Charles Ditmore
Life of this patent
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Abstract
In some examples, a dual-mode autonomous guided vehicle (AGV) is provided for docking a module in a fabrication bay. An example AGV may comprise a chassis for supporting the module on the AGV; drive means to transport the AGV under autonomous guidance, in a module transportation mode, to a specified location within the fabrication bay; a Cartesian x-y movement table to move the module under autonomous guidance, in a module docking mode, in an x- or y-docking direction, into a specific docking position; and a z-direction lift mechanism to move the module in a z-docking direction during the module docking mode.
Claims15
A dual-mode autonomous guided vehicle (AGV) for docking a module in a fabrication bay, the AGV comprising:
- a chassis for supporting the module on the AGV;
- drive means to transport the AGV under autonomous guidance, in a module transportation mode, to a specified location within the fabrication bay;
- a Cartesian x-y movement table to move the module under autonomous guidance, in a module docking mode, in an x- or y-docking direction, into a specific docking position;
- and
- a z-direction lift mechanism to move the module in a z-docking direction during the module docking mode.
Dependencies are inferred from the claim text.