High quality factor embedded resonator wafers
AssigneeApplied Materials, Inc.
InventorsChuang-Chia Lin, Surajit Kumar, Upendra Ummethala
Life of this patent
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Abstract
Embodiments disclosed herein include diagnostic substrates and methods of using such substrates. In an embodiment, a diagnostic substrate comprises a substrate, and a device layer over the substrate. In an embodiment, the diagnostic substrate further comprises a resonator in the device layer. In an embodiment, the resonator comprises a cavity, a cover layer over the cavity, and electrodes within the cavity for driving and sensing resonance of the cover layer. In an embodiment, the diagnostic substrate further comprises a reflector surrounding a perimeter of the resonator.
Claims20
A diagnostic substrate, comprising:
- a substrate;
- a device layer over the substrate;
- a resonator in the device layer, wherein the resonator comprises:
- a cavity;
- a cover layer over the cavity;
- and
- electrodes within the cavity for driving and sensing resonance of the cover layer;
- and
- a reflector surrounding a perimeter of the resonator.
The diagnostic substrate of claim 4, wherein a bottom surface of the cavity and a bottom surface of the reflector are at the same Z-height in the device layer.
A diagnostic substrate, comprising:
- a substrate;
- a device layer over the substrate, wherein the device layer has a first impedance;
- a ring having a second impedance, wherein the ring surrounds at least a portion of the device layer;
- and
- drivers and sensors configured to detect resonance.
A method for determining a processing parameter, comprising:
- processing a diagnostic substrate, wherein the diagnostic substrate comprises a resonator and a reflector surrounding the resonator;
- driving the resonator to a plurality of resonance modes, wherein acoustic waves propagating away from the resonator are reflected back towards the resonator by the reflector;
- recording a resonant frequency of the resonator for each of the resonance modes;
- and
- determining the processing parameter from the resonant frequencies of the plurality of resonance modes.
Dependencies are inferred from the claim text.