Physical property value measurement device, physical property value measurement method, and recording medium

Abstract

This physical property value measurement device irradiates a specimen with a heating beam arrived at through intensity-pulse modulation of output light of a heating laser and irradiates the specimen with a temperature probe beam that is output light from a temperature probe laser and is delayed relative to the heating beam. The component of a detection signal for the reflected light of the temperature probe beam that is synchronous with the frequency of the intensity-pulse modulation is amplified using a lock-in amplifier, and a computer that performs regression analysis on the thermoreflectance signal obtained from the lock-in amplifier. A thermophysical property value is determined by using a theoretical formula of a transfer function that is a Laplace transform in relation to time of a response function by single pulse heating to perform regression analysis on Fourier coefficients obtained when the detection signal for the reflected light of the temperature probe beam is expanded into a Fourier series in relation to time.

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