Inspection apparatus and methods for precision vibration-isolation tabletops
AssigneeTechnical Manufacturing Corporation
InventorsAlexander B.V. Moutafis, Luc Owens Robitaille
Life of this patent
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Abstract
Apparatus and methods to automatically inspect precision tabletops used for vibration isolation are described. An inspection head having an imaging device and/or perturbing device can be positioned automatically at a plurality of locations over a precision tabletop. The inspection head can further include a distance sensor that can be used to determine a flatness of a portion or all of a surface of the precision tabletop. The inspection head may further include marking apparatus to automatically mark non-compliant features formed on the precision tabletop.
Claims24
A vibration-isolation inspection system comprising:
- an inspection head having an imaging array and a perturbing device that imparts mechanical energy to vibration-isolation equipment;
- and
- a system controller configured to control motion of the inspection head.
A method of inspecting a precision tabletop, the method comprising:
- automatically positioning an inspection head at a first location over a precision tabletop;
- obtaining an image of a portion of a surface of the precision tabletop;
- automatically imparting an impulse to the surface with an impact hammer;
- and
- receiving sensor information indicating an effect of the impulse on the surface.
A method of inspecting a precision tabletop, the method comprising:
- automatically positioning an inspection head at a plurality of locations over a precision tabletop;
- obtaining information about physical characteristics of the precision tabletop at the plurality of locations;
- and
- providing the information to a user of the precision tabletop.
Dependencies are inferred from the claim text.