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AssigneeWayne State University
InventorsDavid Dominique Schweinfurth, Lukas Mayr, Sinja Verena Klenk, Sabine Weiguny, Charles Hartger Winter, Kyle Blakeney, Nilanka Weerathunga Sirikkathuge, Tharindu Malawara Arachchige Nimanthaka Karunaratne
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Described herein is a process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state where A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group, E is NR or O, n is 0, 1 or 2, m is 0, 1 or 2, and R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.
A process for preparing inorganic metal-containing films comprising bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state
A compound of general formula (I), (II), (III), or (IV)
Dependencies are inferred from the claim text.