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US 2021/0079518 A1Published application
Metal mask, method of manufacturing the same, and method of manufacturing display panel using the metal mask
AssigneeSamsung Display Co., Ltd.
InventorsHyosung KIM, JinYoung CHOI, SUNGMIN HUR, HYUNSANG SEO, Hyun-Ju LEE, Manjae PARK, NARI AHN, HYEONGSUK YOO, DONGWON HAN
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Abstract
A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.
Claims20
A deposition mask comprising:
- a metal mask body in which a deposition opening is defined;
- and
- a coating layer comprising aluminum oxynitride, on an outer surface of the metal mask body.
A method for manufacturing a deposition mask, the method comprising:
- providing a metal mask body comprising a deposition opening;
- and
- providing a coating layer comprising aluminum oxynitride, on the metal mask body.
A method for manufacturing a display panel, the method comprising:
- providing a target substrate;
- providing a metal deposition mask in which a deposition opening is defined, over the target substrate, wherein the metal deposition mask comprises:
- a metal mask body in which the deposition opening is defined;
- and
- a coating layer comprising aluminum oxynitride, on an outer surface of the metal mask body;
- and
- providing a deposition pattern of the display panel, on the target substrate, the deposition pattern corresponding to the deposition opening of the metal deposition mask having the coating layer which comprises the aluminum oxynitride.
4 more elements
Dependencies are inferred from the claim text.