Liquid-Dispensing System, Apparatus and Method

A semiconductor liquid-dispensing system comprising:

• a plurality of nozzles physically connected to a housing, wherein each nozzle of the plurality of nozzles comprises a nozzle tip that defines a fluid exiting end configured to dispense a corresponding liquid, and wherein the plurality of nozzles are configured to dispense the corresponding liquid on a surface of a semiconductor wafer in the form of a droplet or a stream during processing of the semiconductor wafer;
• and
• a plurality of sensors corresponding to the plurality of nozzles and physically connected to the housing, wherein each sensor of the plurality of sensors is configured to provide a corresponding sensor signal comprising information related to whether the corresponding liquid is dispensed at its corresponding nozzle of the plurality of nozzles, and wherein the plurality of sensors is located in proximity of the plurality of nozzles;
• and
• an aperture structure physically connected to the housing, wherein the aperture structure comprises a plurality of pinholes or slits disposed between the plurality of nozzles and the plurality of sensors;
• and
• an electromagnetic emitter configured to emit electromagnetic radiation towards a path of falling of liquid dispensed by each nozzle, wherein each sensor is configured to provide the corresponding sensor signal based on an influence of dispensed liquid on the electromagnetic radiation, wherein each of the plurality of pinholes or slits is configured to define an angle beam of electromagnetic radiation emitted by the electromagnetic emitter.

A method of operating a semiconductor liquid-dispensing system comprising a nozzle, a sensor configured to provide a sensor signal comprising information related to whether liquid is dispensed by the nozzle, wherein a part of the sensor is located in proximity of the nozzle, an electromagnetic emitter configured to emit electromagnetic radiation towards a path of falling of liquid dispensed by the nozzle, wherein the sensor is configured to provide the sensor signal based on an influence of dispensed liquid on the electromagnetic radiation, and, an aperture structure comprising an aperture disposed between the nozzle and the sensor, wherein the aperture is configured to define an angle beam of electromagnetic radiation emitted by the electromagnetic emitter, the method comprising:

• dispensing a liquid from the nozzle;
• sensing the dispensed liquid using the sensor;
• and
• generating the sensor signal at the sensor based on the sensing.