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US 2021/0077958 A1Published application
System for storing chemical liquid and method for adjusting gas concentration in chemical liquid
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Yu KUO, Shang-Yun HUANG, Weibo YU, Shang-Yuan YU
Life of this patent
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Abstract
Chemical liquid is injected into a tank. A concentration of a first gas dissolved in the chemical liquid is detected. Based on the detected concentration of the first gas, at least one of the first gas and a second gas is injected into the tank to sustain at least one of the concentration of the first gas and a concentration of the second gas in a range of a target value.
Claims20
A method, comprising:
- injecting a chemical liquid into a tank;
- detecting a concentration of a first gas dissolved in the chemical liquid;
- and
- based on the detected concentration of the first gas, injecting at least one of the first gas and a second gas into the tank to sustain at least one of the concentration of the first gas and a concentration of the second gas in a range of a target value .
1 more element
A method comprising:
- injecting a chemical liquid into a tank;
- detecting a concentrations of a first gas dissolved in the chemical liquid in the tank;
- and
- based on the detected concentration of the first gas, controlling at least one of valves of the first gas and a second gas to sustain at least one of the concentration of the first gas and a concentration of the second gas in a range of a target value.
1 more element
A system comprising:
- a tank configured to store a chemical liquid;
- a plurality of gas pipes configured to respectively inject gases into the tank;
- a plurality of valves on the gas pipes and configured to respectively control flow rates of the gases into the tank;
- a concentration sensor configured to detect concentrations of the gases in the chemical liquid;
- and
- a controller electrically connected to the valves and the concentration sensor, and configured to adjust the valves based on the detected concentrations of the gases.
3 more elements
Dependencies are inferred from the claim text.