Ejection device, imprint apparatus, and detection method
AssigneeCanon Kabushiki Kaisha
InventorsAkiko Iimura, Noriyasu Hasegawa, Yoshimasa Araki
Life of this patent
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Abstract
An ejection device includes: an ejection unit provided with an ejection port configured to eject an ejection material; a piezoelectric element configured to cause the ejection material to be ejected from the ejection unit; a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material; a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber; and a detection unit configured to detect a wetness of an ejection port side surface.
Claims19
An ejection device, including:
- an ejection unit provided with an ejection port configured to eject an ejection material;
- an energy generation element provided in the ejection unit and configured to cause the ejection material to be ejected from the ejection port;
- a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material;
- and
- a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber and control the first liquid chamber to have a negative pressure while the ejection material is ejected by the energy generation element, wherein the ejection device comprising:
- a detection unit configured to detect a wetness on a surface of the ejection port.
A method of detecting a wetness of an ejection material in an ejection device including
- an ejection unit provided with an ejection port configured to eject the ejection material,
- an energy generation element provided in the ejection unit and configured to cause the ejection material to be ejected from the ejection port,
- a first liquid chamber connected to the ejection unit and configured to supply the ejection unit with the ejection material, and
- a pressure control unit configured to control a pressure in the ejection unit by controlling a pressure in the first liquid chamber and control the first liquid chamber to have a negative pressure while the ejection material is ejected by the energy generation element,
- the detection method comprising:
- controlling the first liquid chamber to have a positive pressure by the pressure control unit;
- and
- detecting the wetness by a detection unit in the state where the first liquid chamber is controlled to have the positive pressure.
Dependencies are inferred from the claim text.