Processing apparatus
AssigneeDisco Corporation
InventorToshiyuki SAKAI
Life of this patent
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AssigneeDisco Corporation
InventorToshiyuki SAKAI
Estimating the term…
There is provided a processing apparatus that polishes the back surface side of a wafer on which devices are formed on the front surface side. The processing apparatus includes a chuck table that holds the wafer and rotates and a polishing unit that forms scratches on the back surface side of the wafer while polishing the back surface side of the wafer. The processing apparatus includes also a scratch determining unit that determines whether or not the scratches exist on the back surface side of the wafer polished by the polishing unit and an informing unit that informs that a region in which the scratches do not exist is included in the wafer when a region for which it has been determined that the scratches do not exist by the scratch determining unit is included in the wafer.
A processing apparatus that polishes a back surface side of a wafer on which devices are formed on a front surface side, the processing apparatus comprising:
Dependencies are inferred from the claim text.