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US 2021/0066053 A1Published application
Annular member, substrate processing apparatus and method of controlling substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsHiroshi NAGAIKE, Naoki SUGAWA
Life of this patent
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Abstract
An annular member includes an annular member body to be disposed around a substrate in a substrate processing apparatus. A heterogeneous material portion is disposed in the annular member body and formed of a heterogeneous material different from a material of the annular member body.
Claims10
An annular member, comprising:
- an annular member body to be disposed around a substrate in a substrate processing apparatus;
- and
- a heterogeneous material portion disposed in the annular member body and formed of a heterogeneous material different from a material of the annular member body.
A substrate processing apparatus, comprising:
- an annular member to be disposed around a substrate in a substrate processing apparatus;
- a heterogeneous material portion disposed in the annular member and formed of a heterogeneous material different from a material of the annular member;
- and
- a detector configured to detect a product produced in etching the heterogeneous material.
1 more element
A method of controlling a substrate processing apparatus, the substrate processing apparatus including:
- an annular member to be disposed around a substrate in a substrate processing apparatus;
- a heterogeneous material portion disposed in the annular member and formed of a heterogeneous material different from a material of the annular member;
- and
- a detector configured to detect a product produced in etching the heterogeneous material, the method comprising a step of:
- determining a consumption state of the annular member based on a detection value of the detector.
2 more elements
Dependencies are inferred from the claim text.