Charged particle beam device

A charged particle beam device comprising:

• an input and output device that receives, as inputs, a charged particle beam condition related to a charged particle beam applied in order to estimate a circuit state of a sample, a light condition related to light applied in order to estimate the circuit state of the sample, and electronic device circuit information for defining a circuit of the sample;
• a charged particle beam control system that controls the charged particle beam applied to the sample based on the charged particle beam condition;
• a light control system that controls the light applied to the sample based on the light condition;
• a detector that detects secondary electrons emitted from the sample by the application of the charged particle beam and the light, and outputs a detection signal based on the secondary electrons;
• and
• a calculator that generates a calculation netlist based on the electronic device circuit information, generates a light irradiation netlist based on the calculation netlist and the light condition, estimates a first irradiation result when the charged particle beam and the light are applied to the sample based on the light irradiation netlist and the charged particle beam condition, and compares the first irradiation result with a second irradiation result when the charged particle beam and the light are applied to the sample based on the charged particle beam condition.