Optical modulator and package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLan-Chou Cho, Chewn-Pu Jou, Feng-Wei Kuo, Huan-Neng Chen, Min-Hsiang Hsu
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Abstract
An optical modulator includes a dielectric layer and a waveguide. The waveguide is disposed on the dielectric layer. The waveguide includes an electrical coupling portion, a slab portion, and an optical coupling portion. The slab portion is sandwiched between the electrical coupling portion and the optical coupling portion. The slab portion has at least two sub-portions having different heights. A maximum height of the slab portion is smaller than a height of the electrical coupling portion.
Claims20
An optical modulator, comprising:
- a dielectric layer;
- a waveguide disposed on the dielectric layer, wherein the waveguide comprises an electrical coupling portion, a slab portion, and an optical coupling portion, the slab portion is sandwiched between the electrical coupling portion and the optical coupling portion, the slab portion has at least two sub-portions having different heights, and a maximum height of the slab portion is smaller than a height of the electrical coupling portion.
An optical modulator, comprising:
- a waveguide, wherein the waveguide comprises a first portion and a second portion next to the first portion, the first portion comprises a first electrical coupling portion, a first slab portion connected to the first electrical coupling portion, and a first optical portion connected to the first slab portion, the second portion comprises a second electrical coupling portion, a second slab portion connected to the second electrical coupling portion, and a second optical coupling portion connected to the second slab portion, an interfacial area between the first electrical coupling portion and the first slab portion is larger than an interfacial area between the first slab portion and the first optical coupling portion, and a maximum height of the first slab portion is smaller than a height of the first electrical coupling portion.
A package, comprising:
- a processor;
- an optical modulator, comprising:
- a dielectric layer;
- and
- a waveguide disposed on the dielectric layer, wherein the waveguide comprises an electrical coupling portion, a slab portion, and an optical coupling portion, the slab portion is sandwiched between the electrical coupling portion and the optical coupling portion, and the slab portion is ladder shaped;
- and
- a driver configured to drive the optical modulator, wherein the driver is electrically connected to the processor.
Dependencies are inferred from the claim text.