Electromagnet control device and electromagnet system
AssigneeEbara Corporation
InventorsHaruka TAKEUCHI, Tomonori OHASHI, Ichiju SATO
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AssigneeEbara Corporation
InventorsHaruka TAKEUCHI, Tomonori OHASHI, Ichiju SATO
Estimating the term…
A target value of magnetic flux density and magnetic flux density actually obtained are made to coincide precisely with each other. An electromagnet control device comprises a current value determining unit for determining, based on a magnetic flux density instruction value, a value of current that is made to flow through a coil. The current value determining unit is constructed to execute a second process for determining, based on a second function, a value of the current, if the magnetic flux density is to be decreased from that in a first magnetization state, and a fourth process for expanding or reducing the second function by use of a first scaling ratio for transforming it to a fourth function, and determining, based on the fourth function obtained after above transformation, a value of the current, if the magnetic flux density is to be decreased from that in a third magnetization state.
An electromagnet control device for controlling current flowing through a coil of an electromagnet, which comprises a yoke and the coil, comprising:
Dependencies are inferred from the claim text.