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US 2021/0063497 A1Published application
Shielded sensor structure and method of making same
AssigneeTexas Instruments Incorporated
InventorsYONG DENG, JO BITO, BENJAMIN STASSEN COOK
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Abstract
In a described example, a structure includes a substrate having a surface with multiple sides. A sensor is positioned within the substrate and a seed layer is over at least four sides of the surface of the substrate. A magnetic shield layer is over the seed layer for the at least four sides of the surface of the substrate.
Claims20
A structure, comprising:
- a substrate having a surface with at least four sides;
- a sensor positioned within the substrate;
- a seed layer over at least four sides of the surface of the substrate;
- and
- a magnetic shield layer over the seed layer for the at least four sides of the surface of the substrate.
2 more elements
A method of forming a structure, the method comprising:
- providing a substrate comprising a surface having six sides, a sensor positioned within the substrate;
- forming a seed layer over at least four sides of the surface of the substrate;
- and
- forming a magnetic shield layer over the seed layer for the at least four sides of the surface of the substrate.
1 more element
Dependencies are inferred from the claim text.