Placement apparatus control method, placement apparatus, and inspection apparatus

A method of controlling a placement apparatus including a stage configured to place a target object thereon, a support table configured to support the stage to be rotatable forward and backward, a rotary drive mechanism configured to rotate the stage including a first motion conversion mechanism configured to convert a rotary motion of a drive motor into a linear motion of a moving body and a second motion conversion mechanism configured to convert a linear motion of the moving body into a rotary motion of the stage, and a controller configured to control the rotary drive mechanism, wherein the method comprises:

• a first correction step of calculating a first correction value of a drive angle of the stage for a linear movement amount of the moving body;
• a second correction step of obtaining a second correction value based on an error for each predetermined pitch;
• and
• a drive step of rotationally driving the stage based on the first correction value and the second correction value obtained in the first correction step and the second correction step, respectively.