Electrical connecting device, inspection apparatus, and method for electrical connection between contact target and contact member
AssigneeTokyo Electron Limited
InventorJun MOCHIZUKI
Life of this patent
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AssigneeTokyo Electron Limited
InventorJun MOCHIZUKI
Estimating the term…
An electrical connecting device having one or more contact members to be in contact with a contact target is provided. The electrical connecting device includes a main body having one or more recesses on a surface thereof opposed to the contact target, and a flexible portion that covers the recesses to form sealed spaces. The main body includes a gas exhaust passage and an air supply passage provided for each of the sealed spaces to adjust a pressure in each of the sealed spaces, and the contact members are respectively disposed to be opposed to the recesses with the flexible portion interposed therebetween.
An electrical connecting device having one or more contact members to be in contact with a contact target, the electrical connecting device comprising:
A method for electrically connecting a contact member and a contact target covered with an insulating layer in an electrical connecting device including the contact member, a main body having a recess on a surface thereof opposed to the contact target, and a flexible portion that covers the recess to form a sealed space, wherein the contact member is disposed to be opposed to the recess with the flexible portion interposed therebetween, the method comprising:
Dependencies are inferred from the claim text.