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US 2021/0063259 A1Published application
Strain gauge
AssigneeMINEBEA MITSUMI Inc.
InventorsEiji MISAIZU, Shigeyuki ADACHI, Kosuke KITAHARA, Toshiaki ASAKAWA, Atsushi KITAMURA
Life of this patent
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Abstract
A strain gauge includes a flexible substrate; and resistors each formed of a Cr composite film. The resistors include a first resistor and a second resistor that are formed on one side of the substrate, and include a third resistor and a fourth resistor that are formed on another side of the substrate. The first resistor, the second resistor, the third resistor, and the fourth resistor constitute a Wheatstone bridge circuit.
Claims11
A strain gauge comprising:
- a flexible resin substrate;
- resistors each formed of a film that includes Cr, CrN, and Cr2N;
- and
- a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being in a lower surface of the resistors,
- wherein an element included in the functional layer is diffused into the film, wherein the resistors include a first resistor and a second resistor that are formed on one side of the substrate;
- and a third resistor and a fourth resistor that are formed on another side of the substrate,
- wherein the first resistor, the second resistor, the third resistor, and the fourth resistor constitute a Wheatstone bridge circuit, and
- wherein a gauge factor of the strain gauge is 10 or more.
5 more elements
(canceled)
(canceled)
A strain gauge comprising:
- a flexible resin substrate;
- resistors each formed of a film that includes Cr, CrN, and Cr2N;
- and
- a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being in a lower surface of the resistors,
- wherein an element included in the functional layer is diffused into the film,
- wherein the resistors include a first resistor and a second resistor that are formed on one side of the substrate;
- and a third resistor and a fourth resistor that are formed on another side of the substrate,
- wherein the first resistor, the second resistor, the third resistor, and the fourth resistor constitute a Wheatstone bridge circuit, and
- wherein a temperature coefficient of resistance of the strain gauge is in a range of from −1000 ppm/° C. to +1000 ppm/° C.
6 more elements
A strain gauge comprising:
- a flexible resin substrate;
- resistors each formed of a film that includes Cr, CrN, and Cr2N;
- and
- a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being in a lower surface of the resistors,
- wherein the resistors include a first resistor and a second resistor that are formed on one side of the substrate;
- and a third resistor and a fourth resistor that are formed on another side of the substrate, and
- wherein the first resistor, the second resistor, the third resistor, and the fourth resistor constitute a Wheatstone bridge circuit.
4 more elements
Dependencies are inferred from the claim text.