Vibrator device
AssigneeSeiko Epson Corporation
InventorsSeiichiro OGURA, Keiichi YAMAGUCHI, Ryuta NISHIZAWA
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AssigneeSeiko Epson Corporation
InventorsSeiichiro OGURA, Keiichi YAMAGUCHI, Ryuta NISHIZAWA
Estimating the term…
A vibrator device includes a vibrator element, a base, and a support configured to support the vibrator element with respect to the base. The support includes a frame shaped like a frame, a base mount disposed outside the frame, and fixed to the base, an element holder which is disposed inside the frame, and on which the vibrator element is mounted, a pair of first beams which extend along a first direction from the element holder, and couple the element holder and the frame to each other, and a pair of second beams which extend along a second direction from the frame, and couple the frame and the base mount to each other, and W12/L1<30, in which a length in the first direction of the first beam is L1 (μm), and a width in a direction perpendicular to the first direction of the first beam is W1 (μm).
A vibrator device comprising:
Dependencies are inferred from the claim text.