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US 2021/0062322 A1Published application
Deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsKookchol PARK, Suhyun OH, Sokwon NOH
Life of this patent
Estimating the term…
Abstract
A deposition apparatus may include a chamber, a crucible in the chamber, a cover part covering the crucible, and 2n nozzles (where ‘n’ is a positive integer number) protruding from the cover part and arranged in a first direction. Among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle may be greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle.
Claims20
A deposition apparatus comprising:
- a chamber;
- a crucible in the chamber;
- a cover part covering the crucible;
- and
- 2n nozzles (where ‘n’ is a positive integer number) protruding from the cover part and arranged in a first direction,
- wherein, among the 2n nozzles, a distance between a n-th nozzle and a (n+1)-th nozzle is greater than a distance between a (2n−1)-th nozzle and a 2n-th nozzle.
3 more elements
A deposition apparatus comprising:
- a chamber;
- a crucible in the chamber;
- a cover part covering the crucible and including a top surface parallel to both a first direction and a second direction crossing the first direction;
- and
- a plurality of nozzles protruding from the cover part and arranged with each other in the first direction,
- wherein a distance between adjacent two of the plurality of nozzles is varied depending on a position, and all of the plurality of nozzles are inclined with respect to a third direction perpendicular to the top surface.
3 more elements
Dependencies are inferred from the claim text.