Inertial Sensor Unit, Electronic Apparatus, And Vehicle

An inertial sensor unit comprising:

• a substrate;
• a first inertial sensor arranged at the substrate, with a main surface of the first inertial sensor laid along a first axis and a second axis intersecting the first axis;
• and
• a second inertial sensor arranged at the substrate, with a main surface of the second inertial sensor laid along the first axis and a third axis intersecting the first axis and the second axis,
• the first inertial sensor having a first acceleration sensor element configured to detect an acceleration in a direction along the first axis, and a second acceleration sensor element configured to detect an acceleration in a direction along the second axis,
• the second inertial sensor having a third acceleration sensor element configured to detect an acceleration in a direction along the third axis, and a fourth acceleration sensor element configured to detect an acceleration in a direction along the first axis,
• the first acceleration sensor element, the second acceleration sensor element, the third acceleration sensor element, and the fourth acceleration sensor element having comb-tooth shaped detection electrodes.

An inertial sensor unit comprising:

• a substrate;
• a first inertial sensor arranged at the substrate, with a main surface of the first inertial sensor laid along a first axis and a second axis intersecting the first axis;
• and
• a second inertial sensor arranged at the substrate, with a main surface of the second inertial sensor laid along the first axis and a third axis intersecting the first axis and the second axis,
• the first inertial sensor having a first acceleration sensor element configured to detect an acceleration in a direction along the first axis, a second acceleration sensor element configured to detect an acceleration in a direction along the second axis, and a first angular velocity sensor element configured to detect an angular velocity about the third axis,
• the second inertial sensor having a third acceleration sensor element configured to detect an acceleration in a direction along the third axis, a fourth acceleration sensor element configured to detect an acceleration in a direction along the first axis, and a second angular velocity sensor element configured to detect an angular velocity about the second axis,
• each of the first acceleration sensor element, the second acceleration sensor element, and the first angular velocity sensor element having a first detection electrode and a second detection electrode,
• the first detection electrode and the second detection electrode extending in a certain direction,
• one of the first detection electrode and the second detection electrode being a fixed detection electrode,
• the other of the first detection electrode and the second detection electrode being a moving detection electrode,
• each of the third acceleration sensor element, the fourth acceleration sensor element, and the second angular velocity sensor element having a third detection electrode and a fourth detection electrode,
• the third detection electrode and the fourth detection electrode extending in a certain direction,
• one of the third detection electrode and the fourth detection electrode being a fixed detection electrode,
• the other of the third detection electrode and the fourth detection electrode being a moving detection electrode.