Laminar flow restrictor
AssigneeIchor Systems, Inc.
InventorsSean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright
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Abstract
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
Claims29
A flow restrictor for restricting the flow of a gas, the flow restrictor comprising:
- a first end;
- a second end, a longitudinal axis extending from the first end to the second end;
- a plurality of first layers extending from the first end to the second end along the longitudinal axis;
- a plurality of second layers extending from the first end to the second end along the longitudinal axis;
- a first aperture at the first end defined by the plurality of first layers and the plurality of second layers;
- a second aperture at the second end defined by the plurality of first layers and the plurality of second layers;
- wherein a flow passage is defined by the plurality first layers and the plurality of second layers, the flow passage extending from the first aperture to the second aperture.
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A mass flow control apparatus for delivery of a fluid, the mass flow control apparatus comprising:
- a valve comprising an inlet passage, an outlet passage, a valve seat, and a closure member;
- and
- a flow restrictor, the flow restrictor positioned in one of the inlet passage or the outlet passage, the flow restrictor comprising:
- a first end;
- a second end, a longitudinal axis extending from the first end to the second end;
- a plurality of layers extending substantially parallel to the longitudinal axis;
- a first aperture at the first end;
- a second aperture at the second end;
- and
- a flow passage defined by the plurality of layers, the flow passage fluidly coupled to the first aperture and the second aperture.
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A method of manufacturing a flow restrictor, the method comprising:
- a) providing a plurality of layer blanks, the layer blanks having a first edge, a second edge opposite the first edge, a third edge, a fourth edge opposite the third edge, a front face, and a rear face opposite the front face;
- b) forming a first cavity in the front face of a first one of the plurality of layer blanks;
- c) stacking the plurality of layer blanks;
- d) bonding the plurality of layer blanks to form a resistor stack having a first unfinished end and an opposite second unfinished end, the first unfinished end of the resistor stack formed by the first edges of the plurality of layer blanks and the second unfinished end of the resistor stack formed by the second edges of the plurality of layer blanks;
- e) removing material from the first unfinished end of the layer stack to expose the first cavity and form a first aperture.
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Dependencies are inferred from the claim text.