Position adjustment device and ultraprecision machine tool

Abstract

A position adjustment device for adjusting a height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and having formed therein a plurality of cuts extending along a first direction that is orthogonal to the height direction; and an adjustment mechanism configured to adjust expansion and contraction of the expanding and contracting portion. The expanding and contracting portion has a crank shape in which a plurality of the cuts formed on one side in the first direction and a plurality of the cuts formed on the other side in the first direction are alternated along the height direction.

Dependencies are inferred from the claim text.