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US 2021/0005433 A1Published application
Aluminum apparatus with aluminum oxide layer and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsRu-Chien CHIU, Bing-Hung CHEN, Keith Kuang-Kuo KOAI
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Abstract
In a method, an aluminum body is chemically treated with at least one of an alkaline solution and an acid solution. Anode-oxidization is performed on the chemically treated aluminum body to form an aluminum oxide layer. The aluminum oxide layer is treated with hot water at a temperature more than 75° C. or steam. The aluminum oxide layer after being treated with hot water or steam includes plural columnar grains, and an average width of the columnar grains is in a range from 10 nm to 100 nm.
Claims20
A method comprising:
- chemically treating an aluminum body with at least one of an alkaline solution and an acid solution;
- performing anode-oxidization on the chemically treated aluminum body to form an aluminum oxide layer;
- and
- treating the aluminum oxide layer with hot water at a temperature of more than 75° C. or steam,
- wherein the aluminum oxide layer after being treated with hot water or steam includes plural columnar grains, and an average width of the columnar grains is in a range from 10 nm to 100 nm.
2 more elements
A method comprising:
- preparing an aluminum body;
- polishing a surface of the aluminum body;
- chemically treating the surface-polished aluminum body with at least one of an alkaline solution and an acid solution;
- performing anode-oxidization on the chemically treated aluminum body to form an aluminum oxide layer;
- and
- treating the aluminum oxide layer with hot water at a temperature of more than 75° C. or steam.
3 more elements
A method comprising:
- preparing an aluminum body;
- annealing the aluminum body at a temperature of 200° C. to 400° C.;
- polishing a surface of the aluminum body after the annealing;
- chemically treating the surface-polished aluminum body with at least one of an alkaline solution and an acid solution;
- performing anode-oxidization on the chemically treated aluminum body to form an aluminum oxide layer;
- and
- treating the aluminum oxide layer with hot water at a temperature of more than 75° C. or steam.
4 more elements
Dependencies are inferred from the claim text.