Device and method for producing master diffraction grating
AssigneeShimadzu Corporation
InventorYuki OUE
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Abstract
A device for producing a master diffraction grating includes a light source unit and a reflecting member 11. The light source unit forms a first interference fringe by irradiating a substrate surface of a master substrate 101 with light. The reflecting member 11 reflects the light from the light source unit reflected on the substrate surface of the master substrate 101 and guides the light again to the substrate surface side to form a second interference fringe. A resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate 101.
Claims6
A device for producing a master diffraction grating serving as a matrix for producing a replica diffraction grating, the device comprising:
- a light source unit for forming a first interference fringe by irradiating a substrate surface of a master substrate with light;
- and
- a reflecting member for reflecting light from the light source unit reflected on the substrate surface of the master substrate and guiding the light again to the substrate surface, so that a second interference fringe is formed, wherein
- a resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate.
A method for producing a master diffraction grating serving as a matrix for producing a replica diffraction grating, the method comprising:
- a resist pattern forming step of forming a first interference fringe by irradiating a substrate surface of a master substrate with light from a light source unit, and forming a second interference fringe by reflecting light from the light source unit reflected on the substrate surface of the master substrate on a reflecting member and guiding again the light to the substrate surface, so as to form a resist pattern based on the first interference fringe and the second interference fringe on the substrate surface of the master substrate;
- a grating pattern forming step of forming a grating pattern having a grating groove on the substrate surface of the master substrate by performing etching using the resist pattern as a mask;
- and
- a film forming step of forming a metal thin film on the grating pattern.
Dependencies are inferred from the claim text.