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US 2021/0002143 A1Published application
Tantalum chloride and method for producing tantalum chloride
AssigneesToho Titanium Co., Ltd., JX Nippon Mining & Metals Corporation
InventorsSeiichiro Tani, So Fukasawa, Hideyuki Takahashi
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Abstract
The tantalum chloride according to the present invention contains TaCl5, and has a total content of tantalum subchlorides of 1% by mass or less.
Claims10
A tantalum chloride, the tantalum chloride containing TaCl5, and having a total content of tantalum subchlorides of 1% by mass or less.
A method for producing a tantalum chloride by heating a tantalum raw material in a chlorine atmosphere to chlorinate the tantalum raw material, the method comprising the steps of:
- using a tantalum chlorinating apparatus, filling a raw material reaction tube of the tantalum chlorinating apparatus with the tantalum raw material to form a packed bed of the tantalum raw material, and feeding a chlorine gas to the raw material reaction tube to provide the raw material reaction tube with a chlorine atmosphere;
- and
- setting a reaction temperature of the tantalum raw material during heating to a temperature of 200° C. to 700° C., and setting a flow rate of the chlorine gas fed to the raw material reaction tube during heating of the tantalum raw material to 0.05 cm/s to 0.82 cm/s.
Dependencies are inferred from the claim text.