Vapor chamber, electronic device, metallic sheet for vapor chamber and manufacturing method of vapor chamber

A vapor chamber in which a working fluid is enclosed, the vapor chamber comprising:

• a first metallic sheet;
• a second metallic sheet laminated on the first metallic sheet;
• and
• a sealed space which is provided between the first metallic sheet and the second metallic sheet, the sealed space including a vapor flow path portion through which a vapor of the working fluid passes and a liquid flow path portion through which the working fluid in liquid form passes,
• wherein the liquid flow path portion includes a plurality of grooves through which the working fluid in liquid form passes, and
• a plurality of groove convex portions each protrude toward the grooves.

A manufacturing method of a vapor chamber comprising a first metallic sheet, a second metallic sheet laminated on the first metallic sheet, a third metallic sheet which is interposed between the first metallic sheet and the second metallic sheet, and a sealed space which is provided between the first metallic sheet and the second metallic sheet and in which a working fluid is enclosed, the sealed space including a vapor flow path portion through which a vapor of the working fluid passes and a liquid flow path portion through which the working fluid in liquid form passes, the manufacturing method of the vapor chamber comprising:

• half-etching in which the liquid flow path portion is formed in one of a surface of the first metallic sheet on a side of the third metallic sheet and on a surface of the third metallic sheet on a side of the first metallic sheet by half-etching;
• joining the first metallic sheet and the second metallic sheet via the third metallic sheet such that the sealed space is formed between the first metallic sheet and the second metallic sheet;
• and
• enclosing the working fluid in the sealed space,
• wherein the liquid flow path portion includes a plurality of grooves through which the working fluid in liquid form passes, and
• a plurality of groove convex portions each protrude toward the grooves from the other of a surface of the first metallic sheet on a side of the third metallic sheet, and a surface of the third metallic sheet on a side of the first metallic sheet, and.

A manufacturing method of a vapor chamber including a sealed space which is provided between a first metallic sheet and a second metallic sheet and in which a working fluid is enclosed, the sealed space including a vapor flow path portion through which a vapor of the working fluid passes and a liquid flow path portion through which the working fluid in liquid form passes, the manufacturing method of the vapor chamber comprising:

• half-etching in which the liquid flow path portion is formed in a surface of the first metallic sheet on a side of the second metallic sheet by half-etching;
• joining the first metallic sheet and the second metallic sheet such that the sealed space is formed between the first metallic sheet and the second metallic sheet;
• and
• enclosing the working fluid in the sealed space,
• wherein the liquid flow path portion includes a plurality of grooves through which the working fluid in liquid form passes, and
• the second metallic sheet includes a plurality of groove convex portions which each protrudes toward the grooves of the first metallic sheet from a surface of the second metallic sheet on a side of the first metallic sheet.