Mechanical shock detection and phase and frequency correction of a mems mirror

A method of compensating a microelectromechanical system (MEMS) oscillating structure, the method comprising:

• driving the MEMS oscillating structure configured to oscillate about a rotation axis;
• detecting a disturbance event that disrupts an oscillation of the MEMS oscillating structure;
• and
• in response to the detected disturbance event:
• monitoring for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis;
• generating a first compensation signal based on at least a first measured crossing event and a second measured crossing event of the plurality of measured crossing events to correct a frequency of the MEMS oscillating structure;
• and
• generating a second compensation signal based on a third measured crossing event of the plurality of measured crossing events to correct a phase of the MEMS oscillating structure.

A system for driving a microelectromechanical system (MEMS) oscillating structure, comprising:

• the MEMS oscillating structure configured to oscillate about a rotation axis;
• a disturbance event detector configured to detect a disturbance event that disrupts an oscillation of the MEMS oscillating structure;
• and
• a phase frequency detector (PFD) and correction circuit configured to, in response to the detected disturbance event, monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event of the plurality of measured crossing events to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event of the plurality of measured crossing events to correct a phase of the MEMS oscillating structure.