Device, system, and method to regulate temperature of a resonator structure

One or more computer-readable storage media having stored thereon instructions which, when executed by one or more processing units, cause the one or more processing units to perform a method comprising:

• cyclically varying an output of an oscillator circuit, the varying with a resonator which extends over a first region of a substrate, wherein first circuitry operates based on the output of the oscillator circuit, wherein the first circuitry extends over a second region of the substrate;
• communicating a sensor signal which is indicative of a condition of the resonator;
• and
• based on to the sensor signal, operating a thermoelectric cooler (TEC) to transfer heat between the resonator and the TEC, wherein the TEC overlaps, and is thermally coupled with, the resonator.

A system comprising:

• a packaged device comprising:
• a substrate;
• a resonator over a first region of the substrate;
• an oscillator circuit coupled to the resonator;
• first circuitry which is operable based on an output of the oscillator circuit, wherein the first circuitry extends over a second region of the substrate;
• a sensor to communicate a sensor signal indicative of a condition of the resonator;
• and
• a thermoelectric cooler (TEC) which overlaps, and is thermally coupled with, the resonator, the TEC to transfer heat with the resonator based on the sensor signal;
• and
• a display device coupled to the packaged device, the display device to display an image based on the clock signal.