Vertical cavity surface emitting laser device with integrated tunnel junction

A method of fabricating a Vertical Cavity Surface Emitting Laser device, the method comprising:

• providing a substrate;
• providing a first electrical contact;
• providing a first distributed Bragg reflector;
• providing an active layer such that the first distributed Bragg reflector is arranged between the active layer and the substrate;
• providing a second distributed Bragg reflector such that the active layer is arranged between the first distributed Bragg reflector and the second distributed Bragg reflector;
• providing a tunnel junction such that the first distributed Bragg reflector is separated in a first part, comprising at least one pair of layers with different refractive indices, and a second part, comprising at least one pair of layers with different refractive indices, wherein the first part and the second part are characterized by different conductivity types, wherein the relative thickness of the second part with respect to the total thickness of the first part and the second part of the first distributed Bragg reflector is between 0.1-0.8;
• and
• providing a second electrical contact, wherein the first electrical contact and the second electrical contact are arranged to provide an electrical drive current to electrically pump the Vertical Cavity Surface Emitting Laser device.

A method of fabricating a Vertical Cavity Surface Emitting Laser device, the method comprising:

• providing a substrate;
• providing a first electrical contact;
• providing a first distributed Bragg reflector;
• providing an active layer such that the first distributed Bragg reflector is arranged between the active layer and the substrate;
• providing a second distributed Bragg reflector such that the active layer is arranged between the first distributed Bragg reflector and the second distributed Bragg reflector;
• providing a tunnel junction such that the second distributed Bragg reflector is separated in a first part, comprising at least one pair of layers with different refractive indices, and a second part, comprising at least one pair of layers with different refractive indices, wherein the first part and the second part are characterized by different conductivity types, wherein the second part is arranged on a side of the tunnel junction facing away from the active layer, wherein a relative thickness of the second part with respect to a total thickness of the first part and the second part of the second distributed Bragg reflector is between 0.15-0.6 and
• providing a second electrical contact, wherein the first electrical contact and the second electrical contact are arranged to provide an electrical drive current to electrically pump the Vertical Cavity Surface Emitting Laser device.