Index and gain coupled distributed feedback laser
AssigneePalo Alto Research Center Incorporated
InventorThomas Wunderer
Life of this patent
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Abstract
A laser includes an active region surrounded by first and second waveguide layers. Two or more mask openings are formed within a dielectric layer on a surface parallel to the active region. A refractive grating is formed on the dielectric mask openings and includes three-dimensional grating features spaced apart in the light-propagation direction of the laser. The refractive grating provides modulation of a real part of the effective refractive index of the laser and modulation of the imaginary part is provided by modulation of the current flow through the mask openings.
Claims20
A laser comprising:
- an active region surrounded by first and second waveguide layers, the active region extending along a light-propagation direction of the laser;
- two or more mask openings formed within a dielectric layer on a surface parallel to the active region, the mask openings extending normal to the light-propagation direction and spaced apart in the light-propagation direction of the laser, the mask openings modulating a current flow into the active region;
- and
- a refractive grating formed on the dielectric mask openings comprising three-dimensional grating features spaced apart in the light-propagation direction of the laser, the refractive grating providing modulation of a real part of an effective refractive index of the laser.
A method, comprising:
- injecting current into epitaxial layers of a laser, the epitaxial layers including an active region surrounded by first and second waveguide layers, the active region extending along a light-propagation direction of the laser;
- modulating a current flow into the active region via two or more mask openings formed within a dielectric layer on a surface parallel to the active region, the mask openings extending normal to the light-propagation direction and spaced apart in the light-propagation direction of the laser;
- and
- modulating a real part of an effective refractive index of the laser via a refractive grating formed on the dielectric mask openings, the refractive grating comprising three-dimension grating features spaced apart in the light-propagation direction of the laser.
A method of forming a laser, comprising:
- forming, on a substrate, a first epitaxial part of the laser comprising at least an active region layer surrounded by first and second waveguide layers;
- forming a dielectric layer over the first epitaxial part;
- patterning two or more mask openings within the dielectric layer, the mask openings extend normal to a light-propagation direction of the laser and are spaced apart in the light-propagation direction of the laser;
- and
- forming, in the mask openings using selective area epitaxy, a second epitaxial part of the laser comprising a refractive grating comprising three-dimensional grating features.
Dependencies are inferred from the claim text.