Controlling pressure in a cavity of a light source
AssigneeKLA Corporation
InventorIgor Germanenko
Life of this patent
Estimating the term…
Abstract
Methods and systems for controlling pressure in a cavity of a light source are provided. One system includes a barometric pressure sensor configured for measuring pressure in a cavity of a light source. The system also includes one or more gas flow elements configured for controlling an amount of one or more gases in the cavity. In addition, the system includes a control subsystem configured for comparing the measured pressure to a predetermined range of values for the pressure and, when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.
Claims21
A system configured to control pressure in a cavity of a light source, comprising:
- a barometric pressure sensor configured for measuring pressure in a cavity of a light source;
- one or more gas flow elements configured for controlling an amount of one or more gases in the cavity;
- and
- a control subsystem configured for comparing the measured pressure to a predetermined range of values for the pressure and, when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of said comparing.
A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for controlling pressure in a cavity of a light source, wherein the computer-implemented method comprises:
- measuring pressure in a cavity of a light source;
- controlling an amount of one or more gases in the cavity with one or more gas flow elements;
- comparing the measured pressure to a predetermined range of values for the pressure;
- and
- when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.
A computer-implemented method for controlling pressure in a cavity of a light source, comprising:
- measuring pressure in a cavity of a light source;
- controlling an amount of one or more gases in the cavity with one or more gas flow elements;
- comparing the measured pressure to a predetermined range of values for the pressure;
- and
- when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.
Dependencies are inferred from the claim text.