Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device

A method for manufacturing an annular seal member including a film on part of the surface thereof, the method comprising:

• a first step of fitting an annular member that forms the seal member around an outer circumference of a first jig;
• a second step of sandwiching the annular member between a second jig disposed around an outer circumference of the first jig and a third jig disposed around the outer circumference of the first jig and moved in an axial direction of the first jig to allow a change in a distance between the second jig and the third jig to achieve a state in which an outer circumferential surface of the annular member is exposed between the second jig and the third jig;
• and
• a third step of forming the film on the outer circumferential surface of the annular member in a state in which an outer circumferential surface of the seal member is exposed between the second jig and the third jig.

A method for manufacturing an electronic device, the method comprising:

• causing an excimer laser apparatus including a laser chamber to produce laser light;
• outputting the laser light to an exposure apparatus;
• and
• exposing a light sensitive substrate to the laser light in the exposure apparatus to manufacture the electronic device,
• the laser chamber including
• a container including a first member and a second member and configured to accommodate a laser gas in the container;
• and
• a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member,
• a laser-gas-side surface of the seal member being made of fluorine-based rubber, and
• an atmosphere-side surface of the seal member being formed of a film configured to suppress atmosphere transmission.